Fan-out semiconductor package

ABSTRACT

A fan-out semiconductor package includes: a first connection member having a through-hole; a semiconductor chip disposed in the through-hole of the first connection member and having an active surface having connection pads disposed thereon and an inactive surface opposing the active surface; an encapsulant encapsulating at least portions of the first connection member and the inactive surface of the semiconductor chip; a second connection member disposed on the first connection member and the active surface of the semiconductor chip; and a heat dissipation layer embedded in the encapsulant so that one surface thereof is exposed. The first connection member and the second connection member include, respectively, redistribution layers electrically connected to the connection pads of the semiconductor chip.

CROSS-REFERENCE TO RELATED APPLICATION(S)

This is a Continuation of application Ser. No. 16/035,192, filed on Jul.13, 2018, which is a continuation of U.S. application Ser. No.15/709,162, filed on Sep. 19, 2017, which issued as U.S. Pat. No.10,211,136 on Feb. 19, 2019, which claims benefit of priority to KoreanPatent Application No. 10-2016-0127502, filed on Oct. 4, 2016 in theKorean Intellectual Property Office, the disclosure of which areincorporated herein by reference in their entirety.

TECHNICAL FIELD

The present disclosure relates to a semiconductor package, and, moreparticularly, to a fan-out semiconductor package in which connectionterminals may extend outwardly of a region in which a semiconductor chipis disposed.

BACKGROUND

Recently, a significant recent trend in the development of technologyrelated to semiconductor chips has been to reduce the size ofsemiconductor chips. Therefore, in the field of package technology, inaccordance with a rapid increase in demand for small-sized semiconductorchips, or the like, the implementation of a semiconductor package havinga compact size while including a plurality of pins has been demanded.

One type of package technology suggested to satisfy the technical demanddescribed above is a fan-cut semiconductor package. Such a fan-outsemiconductor package has a compact size and may allow a plurality ofpins to be implemented by redistributing connection terminals outwardlyof a region in which a semiconductor chip is disposed.

SUMMARY

An aspect of the present disclosure may provide a fan-out semiconductorpackage in which heat dissipation characteristics are excellent and adecrease in a yield of a semiconductor chip is suppressed.

According to an aspect of the present disclosure, a fan-outsemiconductor package may be provided, in which a heat dissipationlayer, separately manufactured and having excellent neat dissipationcharacteristics, is embedded in an encapsulant encapsulating asemiconductor chip.

According to an aspect of the present disclosure, a fan-outsemiconductor package may include: a first connection member having athrough-hole; a semiconductor chip disposed in the through-hole of thefirst connection member and having an active surface having connectionpads disposed thereon and an inactive surface opposing the activesurface; an encapsulant encapsulating at least portions of the firstconnection member and the inactive surface of the semiconductor chip; asecond connection member disposed on the first connection member and theactive surface of the semiconductor chip; and a heat dissipation layerembedded in the encapsulant so that one surface thereof is exposed. Thefirst connection member and the second connection member may include,respectively, redistribution layers electrically connected to theconnection pads of the semiconductor chip. The heat dissipation layermay have a thickness greater than that of the redistribution layer ofthe first connection member and the redistribution layer of the secondconnection member. The encapsulant may have thermal conductivity greaterthan that of an insulating layer of the second connection member.

BRIEF DESCRIPTION OF DRAWINGS

The above and other aspects, features, and advantages of the presentdisclosure will be more clearly understood from the following detaileddescription, taken in conjunction with the accompanying drawings, inwhich:

FIG. 1 is a schematic block diagram illustrating an example of anelectronic device system;

FIG. 2 is a schematic perspective view illustrating an example of anelectronic device;

FIGS. 3A and 3B are schematic cross-sectional views illustrating statesof a fan-in semiconductor package before and after being packaged;

FIG. 4 is a number of schematic cross-sectional views illustrating apackaging process of a fan-in semiconductor package;

FIG. 5 is a schematic cross-sectional view illustrating a case in whicha fan-in semiconductor package is mounted on an interposer substrate andis finally mounted on a main board of an electronic device;

FIG. 6 is a schematic cross-sectional view illustrating a case in whicha fan-in semiconductor package is embedded in an interposer substrateand is finally mounted on a main board of an electronic device;

FIG. 7 is a schematic cross-sectional view illustrating a fan-outsemiconductor package;

FIG. 8 is a schematic cross-sectional view illustrating a case in whicha fan-out semiconductor package is mounted on a main board of anelectronic device;

FIG. 9 is a schematic cross-sectional view illustrating an example of afan-out semiconductor package;

FIG. 10 is a schematic plan view taken along line I-I′ of the fan-outsemiconductor package of FIG. 9;

FIGS. 11A through 11C are schematic views illustrating an example ofprocesses of manufacturing the fan-out semiconductor package of FIG. 9;

FIG. 12 is a schematic cross-sectional view illustrating another exampleof a fan-out semiconductor package;

FIG. 13 is a schematic cross-sectional view illustrating another exampleof a fan-out semiconductor package;

FIG. 14 is a schematic cross-sectional view illustrating another exampleof a fan-out semiconductor package; and

FIG. 15 is a schematic view illustrating a heat dissipation effectdepending on thermal conductivity of an encapsulant.

DETAILED DESCRIPTION

Hereinafter, exemplary embodiments in the present disclosure will bedescribed with reference to the accompanying drawings. In theaccompanying drawings, shapes, sizes, and the like, of components may beexaggerated or shortened for clarity.

The meaning of a “connection” of a component to another component in thedescription includes an indirect connection through an adhesive layer aswell as a direct connection between two components. In addition,“electrically connected” means the concept including a physicalconnection and a physical disconnection. It can be understood that whenan element is referred to with “first” and “second”, the element is notlimited thereby. They may be used only for a purpose of distinguishingthe element from the other elements, and may not limit the sequence orimportance of the elements. In some cases, a first element may bereferred to as a second element without departing from the scope of theclaims set forth herein. Similarly, a second element may also bereferred to as a first element.

The term “an exemplary embodiment” used herein does not always refer tothe same exemplary embodiment, and is provided to emphasize a particularfeature or characteristic different from that of another exemplaryembodiment. However, exemplary embodiments provided herein areconsidered to be able to be implemented by being combined in whole or inpart one with another. For example, one element described in aparticular exemplary embodiment, even if it is not described in anotherexemplary embodiment, may be understood as a description related toanother exemplary embodiment, unless an opposite or contradictorydescription is provided therein.

Terms used herein are used only in order to describe an exemplaryembodiment rather than limiting the present disclosure.

In this case, singular forms include plural forms unless necessarilyinterpreted otherwise, in context.

Electronic Device

FIG. 1 is a schematic block diagram illustrating an example of anelectronic device system.

Referring to FIG. 1, an electronic device 1000 may accommodate a motherboard 1010 therein. The mother board 1010 may include chip relatedcomponents 1020, network related components 1030, other components 1040,and the like, physically or electrically connected thereto. Thesecomponents may be connected to others, to be described below, to formvarious signal lines 1090.

The chip related components 1020 may include a memory chip such as avolatile memory (for example, a dynamic random access memory (DRAM)), anon-volatile memory (for example, a read only memory (ROM)), a flashmemory, or the like; an application processor chip such as a centralprocessor (for example, a central processing unit (CPU)), a graphicsprocessor (for example, a graphics processing unit (GPU)), a digitalsignal processor, a cryptographic processor, a microprocessor, amicrocontroller, or the like; and a logic chip such as ananalog-to-digital (ADC) converter, an application-specific integratedcircuit (ASIC), or the like. However, the chip related components 1020are not limited thereto, but may also include other types of chiprelated components. In addition, the chip related components 1020 may becombined with each other.

The network related components 1030 may include protocols such aswireless fidelity (Wi-Fi) (Institute of Electrical And ElectronicsEngineers (IEEE) 802.11 family, or the like), worldwide interoperabilityfor microwave access (WiMAX) (IEEE 802.16 family, or the like), IEEE802.20, long term evolution (LIE), evolution data only (Ev-DO), highspeed packet access+ (HSPA+), high speed downlink packet access+(HSDPA+), high speed uplink packet access+ (HSUPA+), enhanced data GSMenvironment (EDGE), global system for mobile communications (GSM),global positioning system (GPS), general packet radio service (GPRS),code division multiple access (CDMA), time division multiple access(TDMA), digital enhanced cordless telecommunications (DECT), Bluetooth,3G, 4G, and 5G protocols, and any other wireless and wired protocolsdesignated since the designation of the above-mentioned protocols.However, the network related components 1030 are not limited thereto,but may also include a variety of other wireless or wired standards orprotocols. In addition, the network related components 1030 may becombined with each other, together with the chip related components 1020described above.

Other components 1040 may include a high frequency inductor, a ferriteinductor, a power inductor, ferrite beads, a low temperature co-firedceramic (LTCC), an electromagnetic interference (EMI) filter, amultilayer ceramic capacitor (MLCC), or the like. However, othercomponents 1040 are not limited thereto, but may also include passivecomponents used for various other purposes, or the like. In addition,other components 1040 may be combined with each other, together with thechip related components 1020 or the network related components 1030described above.

Depending on a type of the electronic device 1000, the electronic device1000 may include other components that may or may not be physically orelectrically connected to the mother board 1010. These other componentsmay include, for example, a camera module 1050, an antenna 1060, adisplay device 1070, a battery 1080, an audio codec (not illustrated), avideo codec (not illustrated), a power amplifier (not illustrated), acompass (not illustrated), an accelerometer (not illustrated), agyroscope (not illustrated), a speaker (not illustrated), a mass storageunit (for example, a hard disk drive) (not illustrated), a compact disk(CD) drive (not illustrated), a digital versatile disk (DVD) drive (notillustrated), or the like. However, these other components are notlimited thereto, but may also include other components used for variouspurposes depending on a type of electronic device 1000, or the like.

The electronic device 1000 may be a smartphone, a personal digitalassistant (PDA), a digital video camera, a digital still camera, anetwork system, a computer, a monitor, a tablet PC, a laptop PC, anetbook PC, a television, a video game machine, a smartwatch, anautomotive component, or the like. However, the electronic device 1000is not limited thereto, and may be any other electronic deviceprocessing data.

FIG. 2 is a schematic perspective view illustrating an example of anelectronic device.

Referring to FIG. 2, a semiconductor package may be used for variouspurposes in the various electronic devices 1000 as described above. Forexample, a main board 1110 may be accommodated in a body 1101 of asmartphone 1100, and various electronic components 1120 may bephysically or electrically connected to the main board 1110. Inaddition, other components that may or may not be physically orelectrically connected to the main board 1110, such as a camera module1130, may be accommodated in the body 1101. Some of the electroniccomponents 1120 may be the chip related components, and thesemiconductor package 100 may be, for example, an application processoramong the chip related components, but is not limited thereto. Theelectronic device is not necessarily limited to the smartphone 1100, butmay be other electronic devices described above.

Semiconductor Package

Generally, numerous fine electrical circuits are integrated in asemiconductor chip. However, the semiconductor chip may not serve as afinished semiconductor product in itself, and may be damaged due toexternal physical or chemical impacts. Therefore, the semiconductor chipitself may not be used, but may be packaged and used in an electronicdevice, or the like, in a packaged state.

Here, semiconductor packaging is required due to the existence of adifference in a circuit width between the semiconductor chip and a mainboard of the electronic device, in terms of electrical connections.Specifically, a size of connection pads of the semiconductor chip and aninterval between the connection pads of the semiconductor chip may bevery fine, but a size of component mounting pads of the main board usedin the electronic device and an interval between the component mountingpads of the main board may be significantly larger than those of thesemiconductor chip. Therefore, it may be difficult to directly mount thesemiconductor chip on the main board, and packaging technology forbuffering a difference in a circuit width between the semiconductor chipand the main board is required.

A semiconductor package manufactured by the packaging technology may beclassified as a fan-in semiconductor package or a fan-out semiconductorpackage, depending on a structure and a purpose thereof.

The fan-in semiconductor package and the fan-out semiconductor packagewill hereinafter be described in more detail, with reference to thedrawings.

(Fan-In Semiconductor Package)

FIGS. 3A and 3B are schematic cross-sectional views illustrating statesof a fan-in semiconductor package before and after being packaged.

FIG. 4 is schematic cross-sectional views illustrating a packagingprocess of a fan-in semiconductor package.

Referring to the drawings, a semiconductor chip 2220 may be, forexample, an integrated circuit (IC) in a bare state, including a body2221 including silicon (Si), germanium (Ge), gallium arsenide (GaAs), orthe like, connection pads 2222 formed on one surface of the body 2221and including a conductive material such as aluminum (Al), or the like,and a passivation layer 2223 such as an oxide film, a nitride film, orthe like, formed on one surface of the body 2221 and covering at leastportions of the connection pads 2222. In this case, since the connectionpads 2222 are significantly small, it is difficult to mount theintegrated circuit (IC) on an intermediate level printed circuit board(PCB) as well as on the main board of the electronic device, or thelike.

Therefore, a connection member 2240 may be formed depending on a size ofthe semiconductor chip 2220 on the semiconductor chip 2220 in order toredistribute the connection pads 2222. The connection member 2240 may beformed by forming an insulating layer 2241 on the semiconductor chip2220 using an insulating material such as a photoimagable dielectric(PID) resin, forming via holes 2243 h opening the connection pads 2222,and then forming wiring patterns 2242 and vias 2243. Then, a passivationlayer 2250 protecting the connection member 2240 may be formed, anopening 2252 may be formed, and an under bump metal layer 2260, or thelike, may be formed. That is, a fan-in semiconductor package 2200including, for example, the semiconductor chip 2220, the connectionmember 2240, the passivation layer 2250, and the underbump metal layer2260 may be manufactured through a series of processes.

As described above, the fan-in semiconductor package may have a packageform in which all of the connection pads, for example, input/output(I/O) terminals, of the semiconductor chip are disposed inside thesemiconductor chip, and may have excellent electrical characteristicsand be produced at a low cost. Therefore, many elements mounted insmartphones have been manufactured in a fan-in semiconductor packageform. Specifically, many elements mounted in smartphones have beendeveloped to implement a rapid signal transfer while having a compactsize.

However, since ail I/O terminals need to be disposed inside thesemiconductor chip in the fan-in semiconductor package, the fan-insemiconductor package has a large spatial limitation. Therefore, it isdifficult to apply this structure to a semiconductor chip having a largenumber of I/O terminals or a semiconductor chip having a compact size.In addition, due to the disadvantage described above, the fan-insemiconductor package may not be mounted directly and used on the mainboard of the electronic device. This is due to the fact that, even in acase that a size of the I/O terminals of the semiconductor chip and aninterval between the I/O terminals of the semiconductor chip areincreased by a redistribution process, the size of the I/O terminals ofthe semiconductor chip and the interval between the I/O terminals of thesemiconductor chip may not be sufficient to mount the fan-insemiconductor package directly on the main board of the electronicdevice.

FIG. 5 is a schematic cross-sectional view illustrating a case in whicha fan-in semiconductor package is mounted on an interposer substrate andis finally mounted on a main board of an electronic device.

FIG. 6 is a schematic cross-sectional view illustrating a case in whicha fan-in semiconductor package is embedded in an interposer substrateand is finally mounted on a main board of an electronic device.

Referring to the drawings, in a fan-in semiconductor package 2200,connection pads 2222, that is, I/O terminals, of a semiconductor chip2220 may be redistributed once more through an interposer substrate2301, and the fan-in semiconductor package 2200 may be finally mountedon a main board 2500 of an electronic device in a state in which it ismounted on the interposer substrate 2301. In this case, solder balls2270, and the like, may be fixed by an underfill resin 2280, or thelike, and an outer side of the semiconductor chip 2220 may be coveredwith a molding material 2290, or the like. Alternatively, a fan-insemiconductor package 2200 may be embedded in a separate interposersubstrate 2302, connection pads 2222, that is, I/O terminals, of thesemiconductor chip 2220 may be redistributed once more by the interposersubstrate 2302 in a state in which the fan-in semiconductor package 2200is embedded in the interposer substrate 2302, and the fan-insemiconductor package 2200 may be finally mounted on a main board 2500of an electronic device.

As described above, it may be difficult to mount and use the fan-insemiconductor package directly on the main board of the electronicdevice. Therefore, the fan-in semiconductor package may be mounted onthe separate interposer substrate and then be mounted on the main boardof the electronic device through a packaging process or may be mountedand used on the main board of the electronic device in a state in whichit is embedded in the interposer substrate.

(Fan-Out Semiconductor Package)

FIG. 7 is a schematic cross-sectional view illustrating a fan-outsemiconductor package.

Referring to the drawing, in a fan-out semiconductor package 2100, anouter side of a semiconductor chip 2120, for example, may be protectedby an encapsulant 2130, and connection pads 2122 of the semiconductorchip 2120 may be redistributed outwardly of the semiconductor chip 2120by a connection member 2140. In this case, a passivation layer 2150 maythen be formed on the connection member 2140, and an underbump metallayer 2160 may be subsequently formed in openings of the passivationlayer 2150. Solder balls 2170 may then be formed on the underbump metallayer 2160. The semiconductor chip 2120 may be an integrated circuit(IC) including a body 2121, the connection pads 2122, a passivationlayer (not illustrated), and the like. The connection member 2140 mayinclude an insulating layer 2141, redistribution layers 2142 formed onthe insulating layer 2141, and vias 2143 electrically connecting theconnection pads 2122 and the redistribution layers 2142 to each other.

As described above, the fan-out semiconductor package may have a form inwhich I/O terminals of the semiconductor chip are redistributed anddisposed outwardly of the semiconductor chip through the connectionmember formed on the semiconductor chip. As described above, in thefan-in semiconductor package, all I/O terminals of the semiconductorchip need to be disposed inside the semiconductor chip. Therefore, whena size of the semiconductor chip is decreased, a size and a pitch ofballs need to be decreased, such that a standardized ball layout may notbe used in the fan-in semiconductor package. On the other hand, thefan-out semiconductor package may have the form in which the I/Oterminals of the semiconductor chip are redistributed and disposedoutwardly of the semiconductor chip through the connection member formedon the semiconductor chip, as described above. Therefore, even in a casethat a size of the semiconductor chip is decreased, a standardized balllayout may be used in the fan-out semiconductor package as it is, suchthat the fan-out semiconductor package may be mounted on the main boardof the electronic device without using a separate interposer substrate,as described below.

FIG. 8 is a schematic cross-sectional view illustrating a case in whicha fan-out semiconductor package is mounted on a main board of anelectronic device.

Referring to the drawing, a fan-out semiconductor package 2100 may bemounted on a main board 2500 of an electronic device through solderballs 2170, or the like. That is, as described above, the fan-outsemiconductor package 2100 includes the connection member 2140 formed onthe semiconductor chip 2120 and capable of redistributing the connectionpads 2122 to a fan-out region that is outside of a size of thesemiconductor chip 2120, such that the standardized ball layout may beused in the fan-out semiconductor package 2100 as it is. As a result,the fan-out semiconductor package 2100 may be mounted on the main board2500 of the electronic device without using a separate interposersubstrate, or the like.

As described above, since the fan-out semi conductor package may bemounted on the main board of the electronic device without using theseparate interposer substrate, the fan-out semiconductor package may beimplemented at a thickness less than that of the fan-in semiconductorpackage using the interposer substrate. Therefore, the fan-outsemiconductor package may be miniaturized and thinned. In addition, thefan-out semiconductor package has excellent thermal characteristics andelectrical characteristics, such that it is particularly appropriate fora mobile product. Therefore, the fan-out semiconductor package may beimplemented in a form more compact than that of a generalpackage-on-package (POP) type using a printed circuit board (PCB), andmay solve a problem due to an occurrence of a warpage phenomenon.

Meanwhile, the fan-out semiconductor package refers to packagetechnology for mounting the semiconductor chip on the main board of theelectronic device, or the like, as described above, and protecting thesemiconductor chip from external impacts, and is a concept differentfrom that of a printed circuit board (PCB) such as an interposersubstrate, or the like, having a scale, a purpose, and the like,different from those of the fan-out semiconductor package, and havingthe fan-in semiconductor package embedded therein.

A fan-out semiconductor package in which a decrease in a yield of asemiconductor chip may be significantly suppressed will be hereinafterdescribed with reference to the drawings.

FIG. 9 is a schematic cross-sectional view illustrating an example of afan-out semiconductor package.

FIG. 10 is a schematic plan view taken along line I-I′ of the fan-outsemiconductor package of FIG. 9.

Referring to the drawings, a fan-out semiconductor package 100Aaccording to an exemplary embodiment in the present disclosure mayinclude a first connection member 110 having a through-hole 110H, asemiconductor chip 120 disposed in the through-hole 110H of the first,connection member 110 and having an active surface having connectionpads 122 disposed thereon and an inactive surface opposing the activesurface, an encapsulant 130 encapsulating at least portions of the firstconnection member 110 and the inactive surface of the semiconductor chip120, a second connection member 140 disposed on the first connectionmember 110 and the active surface of the semiconductor chip 120, and aheat dissipation layer 162 embedded in the encapsulant 130, so that onesurface thereof is exposed. The first connection member 110 may includeredistribution layers 112 a and 112 b electrically connected to theconnection pads 122 of the semiconductor chip 120. The second connectionmember 140 may also include a redistribution layer 142 electricallyconnected to the connection pads 122 of the semiconductor chip 120. Theheat dissipation layer 182 may have a thickness greater than thethicknesses of the redistribution layers 112 a and 112 b of the firstconnection member 110 and of the redistribution layer 142 of the secondconnection member 140.

Recently, in accordance with the improvement of the function of asemiconductor chip, it has become important to effectively dissipateheat generated from the semiconductor chip. For this purpose, in therelated art heat dissipation has been promoted by a method of attachinga heat dissipation member such as a metal plate or plating a metal layerto a semiconductor package. However, in this case, a distance betweenthe heat dissipation member and the semiconductor chip is significant,and it is thus difficult to accomplish a sufficient heat dissipationeffect. In addition, this problem occurs since the heat dissipationmember is formed on a semiconductor package that is alreadymanufactured. Therefore, when a defect occurs in a process of formingthe heat dissipation member, the semiconductor chip also needs to bediscarded, such that a yield of the semiconductor chip may be decreased.Further, a manufacturing process is also somewhat complicated.

On the other hand, in the fan-out semiconductor package 100A accordingto the exemplary embodiment, the heat dissipation layer 182 may beembedded in the encapsulant 130, such that a distance between theinactive surface of the semiconductor chip 120 and the heat dissipationlayer 182 is short, resulting in a sufficient heat dissipation effect.In particular, the heat dissipation layer 182 may include a metal havingexcellent heat dissipation ability, such as copper (Cu). In this case,the heat dissipation layer 182 may have a thickness greater thanthicknesses of circuits of the redistribution layers 112 a, 112 b, and142, or the like, to have an excellent heat dissipation effect.Meanwhile, the heat dissipation layer 182 does not have a wiring form asin a circuit, but may have a post form. For example, the heatdissipation layer 182 may have large and small plane shapes, but is notlimited thereto. Meanwhile, such a heat dissipation layer 182 may alsobe effective in controlling warpage, to thus improve structuralstability of the fan-out semiconductor package.

In addition, the fan-out semiconductor package 190A according to theexemplary embodiment may include a resin layer 180 disposed on theencapsulant 130 and covering at least portions of the exposed onesurface of the heat dissipation layer 182. The heat dissipation layer182 may be formed by a separate process through the resin layer 180, andthe heat dissipation layer 182 may be introduced in a manner ofselectively adopting only sound heat dissipation layers, excludingdefective heat dissipation layers among manufactured heat dissipationlayers 162, and embedding the adopted sound heat dissipation layers inthe encapsulant 130 encapsulating the semiconductor chip 120, such thata decrease in a yield of the semiconductor chip 120 may be significantlysuppressed. Therefore, a cost required for manufacturing the fan-outsemiconductor package 100A may be significantly reduced, and a timerequired for manufacturing the fan-out semiconductor package 100A mayalso be significantly reduced. Meanwhile, openings 181 b, opening atleast portions of the exposed one surface of the heat dissipation layer182, may be formed in the resin layer 180. The heat dissipation layer182 may be opened through the openings 181 b, such that a beatdissipation effect may be excellent, in spite of the existence of theresin layer 180.

In addition, in the fan-out semiconductor package 100A according to theexemplary embodiment, a material having high thermal conductivity may beused as a material of the encapsulant 130. For example, when theencapsulant 130 having thermal conductivity of 30 W/m·K or more is usedtogether with the heat dissipation layer 182 including metal such ascopper (Cu), heat dissipation characteristics may be particularlyexcellent. Thermal conductivity of the encapsulant 130 may be greaterthan that of an insulating layer 141 of the second connection member140. In this case, heat generated from the semiconductor chip 120 may beeffectively transferred to the heat dissipation layer 182 through theencapsulant 130. In order to reduce the thermal conductivity, theencapsulant 130 may include an insulating resin and an inorganic filler,and be formed of a material in which a content of the inorganic filleris low. For example, each of the encapsulant 130 and the secondconnection member 140 may include an insulating resin and an inorganicfiller. In this case, a weight percent of the inorganic filler includedin the encapsulant 130 may be less than that of the inorganic fillerincluded in the insulating layer 141 of the second connection member140.

The respective components included in the fan-out semiconductor package100A according to the exemplary embodiment will hereinafter be describedin more detail.

The first connection member 110 may include redistribution layers 112 aand 112 b, redistributing the connection pads 122 of the semiconductorchip 120 to thus reduce the number of layers of the second connectionmember 140. If necessary, the first connection member 110 may maintainrigidity of the fan-out semiconductor package 100A, depending on certainmaterials, and may serve to secure uniformity of a thickness of theencapsulant 130. In addition, due to the first connection member 110,the fan-cut semiconductor package 100A according to the exemplaryembodiment may be used as a portion of a POP. The first connectionmember 110 may have the through-hole 110H. The semiconductor chip 120may be disposed in the through-hole 110H to be spaced apart from thefirst connection member 110 by a predetermined distance. Side surfacesof the semiconductor chip 120 may be surrounded by the first connectionmember 110. However, such a form is only an example and may be variouslymodified to have other forms, and the first connection member 110 mayperform another function, depending on such a form.

The first connection member 110 may include an insulating layer 111 incontact with the second connection member 140, a first redistributionlayer 112 a in contact with the second connection member 140 andembedded in the insulating layer 111, and a second redistribution layer112 b, disposed on the other surface of the insulating layer 111opposing one surface of the insulating layer 111 in which the firstredistribution layer 112 a is embedded. The first connection member 110may include vias 113 penetrating through the insulating layer 111 andelectrically connecting the first and second redistribution layers 112 aand 112 b to each other. The first and second redistribution layers 112a and 112 b may be electrically connected to the connection pads 122.When the first redistribution layer 112 a is embedded in the insulatinglayer 111, a step generated due to a thickness of the firstredistribution layer 112 a may be significantly reduced, and aninsulating distance of the second connection member 140 may thus becomeconstant. That is, a difference between a distance from theredistribution layer 142 of the second connection member 140 to a lowersurface of the insulating layer 111 and a distance from theredistribution layer 142 of the second connection member 140 to theconnection pad 122 may be less than a thickness of the firstredistribution layer 112 a. Therefore, a high density wiring design ofthe second connection member 140 may be easy to achieve.

A material of the insulating layer 111 is not particularly limited. Forexample, an insulating material may be used as the material of theinsulating layer. In this case, the insulating material may be athermosetting resin such as an epoxy resin, a thermoplastic resin suchas a polyimide resin, an insulating material in which the thermosettingresin or the thermoplastic resin is impregnated with an inorganic filleror a core material such as a glass fiber (or a glass cloth or a glassfabric), for example, prepreg, Ajinomoto Build up Film (ABF), FR-4,Bismaleimide Triazine (BT), or the like. Alternatively, a photoimageabledielectric (PID) resin may also be used as the material of theinsulating layer 111.

The redistribution layers 112 a and 112 b may serve to redistribute theconnection pads 122 of the semiconductor chip 120, and a material ofeach of the redistribution layers 112 a and 112 b may be a conductivematerial such as copper (Cu), aluminum (Al), silver (Ag), tin (Sn), gold(Au), nickel (Ni), lead (Pb), titanium (Ti), or alloys thereof. Theredistribution layers 112 a and 112 b may perform various functions,depending on designs of their corresponding layers. For example, theredistribution layers 112 a and 112 b may include ground (GND) patterns,power (PWR) patterns, signal (S) patterns, and the like. Here, thesignal (S) patterns may include various signals except for the ground(GND) patterns, the power (PWR) patterns, and the like, such as datasignals, and the like. In addition, the redistribution layers 112 a and112 b may include via pads, connection terminal pads, and the like.

Meanwhile, a surface treatment layer (not illustrated) may be formed onsurfaces of some of the pad patterns, or the like, exposed from thesecond redistribution layer 112 b through first openings 181 a, ifnecessary. The surface treatment layer (not illustrated) is notparticularly limited, as long as it is known in the related art, but maybe formed by, for example, electrolytic gold plating, electroless goldplating, organic solderability preservative (OSP) or electroless tinplating, electroless silver plating, electroless nickelplating/substituted gold plating, direct immersion gold (DIG) plating,hot air solder leveling (HASL), or the like. In a case in which thesurface treatment layer (not illustrated) is formed, the secondredistribution layer 112 b may be considered to include the surfacetreatment layer, in the present disclosure.

The vias 113 may electrically connect the redistribution layers 112 aand 112 b formed on different layers from each other, resulting in anelectrical path in the first connection member 110. A material of eachof the vias 113 may be a conductive material. Each of the vias 113 maybe completely filled with the conductive material, or the conductivematerial may be formed along a wall of each of the via holes. Inaddition, each of the vias 113 may have all of the shapes known in therelated art, such as a tapered shape, a cylindrical shape, and the like.Meanwhile, when holes for the vias 113 are formed, some of the pads ofthe first redistribution layer 112 a may serve as a stopper, and it maythus be advantageous in the via hole-formation process that each of thevias 113 have the tapered shape, of which a width of an upper surface isgreater than that of a lower surface. In this case, the vias 113 may beintegrated with portions of the second redistribution layer 112 b.

The semiconductor chip 120 may be an integrated circuit (IC) provided inan amount of several hundreds to several millions of elements or more,integrated in a single chip. The IC may be, for example, an applicationprocessor chip such as a central processor (for example, a CPU), agraphics processor (for example, a GPU), a digital signal processor, acryptographic processor, a microprocessor, a microcontroller, or thelike, but is not limited thereto. The semiconductor chip 120 may beformed on the basis of an active wafer. In this case, a base material ofa body 121 may be silicon (Si), germanium (Ge), gallium arsenide (GaAs),or the like. Various circuits may be formed on the body 121. Theconnection pads 122 may electrically connect the semiconductor chip 120to other components. A material of each of the connection pads 122 maybe a conductive material such as aluminum (Al), or the like. Apassivation layer 123 exposing the connection pads 122 may be formed onthe body 121, and may be an oxide film, a nitride film, or the like, ora double layer of an oxide layer and a nitride layer. A lower surface ofthe connection pad 122 may have a step with respect to a lower surfaceof the encapsulant 130 through the passivation layer 123. As a result, aphenomenon in which the encapsulant 130 bleeds into the lower surface ofthe connection pads 122 may be prevented, to some extent. An insulatinglayer (not illustrated), and the like, may also be further disposed inother required positions.

The inactive surface of the semiconductor chip 120 may be disposed on alevel below an upper surface of the second redistribution layer 112 b ofthe first connection member 110. For example, the inactive surface ofthe semiconductor chip 120 may be disposed on a level below an uppersurface of the insulating layer 111 of the first connection member 110.A height difference between the inactive surface of the semiconductorchip 120 and the upper surface of the second redistribution layer 112 bof the first connection member 110 may be 2 μm or more, for example, 5μm or more. In this case, generation of cracks in corners of theinactive surface of the semiconductor chip 120 may be effectivelyprevented. In addition, a deviation of an insulating distance on theinactive surface of the semiconductor chip 120, in a case in which theencapsulant 130 is used, may be significantly reduced.

The encapsulant 130 may protect the first connection member 110 and/orthe semiconductor chip 120. An encapsulation form of the encapsulant.130 is not particularly limited, but may be a form in which theencapsulant 130 surrounds at least portions of the first connectionmember 110 and/or the semiconductor chip 120. For example, theencapsulant 130 may cover the first connection member 110 and theinactive surface of the semiconductor chip 120, and fill spaces betweenwalls of the through-hole 110H and the side surfaces of thesemiconductor chip 120. In addition, the encapsulant 130 may also fillat least a portion of a space between the passivation layer 123 of thesemiconductor chip 120 and the second connection member 140. Meanwhile,the encapsulant 130 may fill the through-hole 110H to thus serve as anadhesive and reduce buckling of the semiconductor chip 120, depending onthe use of certain materials.

The encapsulant 130 may include an insulating material. The insulatingmaterial may be a material including an inorganic filler and aninsulating resin, for example, a thermosetting resin such as an epoxyresin, a thermoplastic resin such as a polyimide resin, a resin having areinforcing material, such as an inorganic filler impregnated in thethermosetting resin and the thermoplastic resin, such as ABF, FP-4, BT,a PID resin, or the like. In addition, the known molding material suchas an epoxy molding compound (EMC), or the like, may also be used.Alternatively, a material in which a thermosetting resin or athermoplastic resin is impregnated with an inorganic filler and/or acore material such as a class fiber (or a glass cloth or a glass fabric)may also be used as the insulating material.

A material having high thermal conductivity may be used as a material ofthe encapsulant 130. For example, when the encapsulant 130 havingthermal conductivity of 30 W/m·K or more is used together with the heatdissipation layer 182, including the metal such as the copper (Cu), heatdissipation characteristics may be particularly excellent. Thermalconductivity of the encapsulant 130 may be greater than that of aninsulating layer 341 of the second connection member 148. In this case,heat generated from the semiconductor chip 120 may be effectivelytransferred to the heat dissipation layer 182 through the encapsulant130. In order to reduce the thermal conductivity, the encapsulant 130may include an insulating resin and an inorganic filler, and be formedof a material in which a content of the inorganic filler is low. Forexample, each of the encapsulant 130 and the second connection member140 may include an insulating resin and an inorganic filler. In thiscase, a weight percent of the inorganic filler included in theencapsulant 130 may be smaller than that of the inorganic fillerincluded in the insulating layer 141 of the second connection member140.

Conductive particles may be included in the encapsulant 130 in order toincrease the thermal conductivity, if necessary. For example, theconductive particles may be any material that may block electromagneticwaves, for example, copper (Cu), aluminum (Al), silver (Ag), tin (Sn),gold (Au), nickel (Ni), lead (Pb), titanium (Ti), a solder, or the like.However, these are only examples, and the conductive particles are notparticularly limited thereto.

The second connection member 140 may be configured to redistribute theconnection pads 122 of the semiconductor chip 120. Several tens toseveral hundreds of connection pads 122 having various functions may beredistributed by the second connection member 140, and may be physicallyor electrically connected to an external source through connectionterminals 170, to be described below, depending on the functions. Thesecond connection member 140 may include insulating layers 141, theredistribution layers 142 disposed on the insulating layers 141, andvias 143 penetrating through the insulating layers 141 and connectingthe redistribution layers 142 to each other. In the fan-outsemiconductor package 100A according to the exemplary embodiment, thesecond connection member 140 may include a single layer, but may alsoinclude a plurality of layers.

A material of each of the insulating layers 141 may be an insulatingmaterial. In this case, a photosensitive insulating material such as aPID resin may also be used as the insulating material. That is, theinsulating layer 141 may be a photosensitive insulating layer. When theinsulating layer 141 has photosensitive properties, the insulating layer141 may be formed to have a smaller thickness, and a fine pitch of thevia 143 may be achieved more easily. The insulating layer 141 may be aphotosensitive insulating layer including an insulating resin and aninorganic filler. When the insulating layers 141 are multiple layers,materials of the insulating layers 141 may be the same as each other,and may also be different from each other, if necessary. When theinsulating layers 141 are multiple layers, the insulating layers 141 maybe integrated with each other, depending on a process whereby boundariestherebetween may not be apparent.

The redistribution layers 142 may serve to substantially redistributethe connection pads 122. A material of each of the redistribution layers142 may be a conductive material such as copper (Cu), aluminum (Al),silver (Ag), tin (Sn), gold (Au), nickel (Ni), lead (Pb), titanium (Ti),or alloys thereof. The redistribution layers 142 may perform variousfunctions, depending on designs of their corresponding layers. Forexample, the redistribution layers 142 may include ground (GND)patterns, power (PWR) patterns, signal (S) patterns, and the like. Here,the signal (S) patterns may include various signals, such as datasignals, and the like, except for the ground (GND) patterns, the power(PWR) patterns, and the like. In addition, the redistribution layers 142may include via pads, connection terminal pads, and the like.

A surface treatment layer (not illustrated) may be formed on surfaces ofsome of the pad patterns, or the like, exposed from the redistributionlayer 142 of the second connection member 140 through openings 151formed in a passivation layer 150 described below, if necessary. Thesurface treatment layer (not illustrated) is not particularly limited,as long as it is known in the related art, but may be formed by, forexample, electrolytic gold plating, electroless gold plating, organicOSP or electroless tin plating, electroless silver plating, electrolessnickel plating/substituted gold plating, DIG plating, HASL, or the like.When the surface treatment layer (not illustrated) is formed, theredistribution layers 142 of the second connection member 140 may beconsidered to include the surface treatment layer, in the present,disclosure.

The vias 143 may electrically connect the redistribution layers 142, theconnection pads 122, or the like, formed on different layers from eachother, resulting in an electrical path in the fan-out semiconductorpackage 100A. A material of each of the vias 143 may be a conductivematerial such as copper (Cu), aluminum (Al), silver (Ag), tin (Sn), gold(Au), nickel (Ni), lead (Pb), titanium (Ti), or alloys thereof. Each ofthe vias 143 may be completely filled with the conductive material, orthe conductive material may be formed along a wall of each of the vias.In addition, each of the vias 143 may have all of the shapes known inthe related art, such as a tapered shape, a cylindrical shape, and thelike.

Thicknesses of the redistribution layers 112 a and 112 b of the firstconnection member 110 may be greater than those of the redistributionlayers 142 of the second connection member 140. Since the firstconnection member 110 may have a thickness greater than or equal to thatof the semiconductor chip 120, the redistribution layers 112 a and 112 bformed in the first connection member 110 may be formed in large sizes,depending on a scale of the first connection member 110. On the otherhand, the redistribution layers 142 of the second connection member 140may be formed in sizes relatively smaller than those of theredistribution layers 112 a and 112 b of the first connection member 110for thinness of the second connection member 140. Similarly, the vias113 of the first connection member 110 may have dimensions greater thanthose of the redistribution layers 142 of the second connection member140.

The passivation layer 150 may be additionally configured to protect thesecond connection member 140 from external physical or chemical damage.The passivation layer 150 may have openings 151, exposing at leastportions of the redistribution layer 142 of the second connection member140. The number of openings formed in the passivation layer 150 may beseveral tens to several thousands.

A material of the passivation layer 150 is not particularly limited aslong as it is an insulating material. As a non-restrictive example, amaterial having an elastic modulus greater than that of the insulatinglayer 141 of the second connection member 140 may be used as thematerial of the passivation layer 150. For example, ABF that does notinclude a glass fiber (or a glass cloth or a glass fabric), but includesan inorganic filler and an insulating resin, or the like, may be used asthe material of the passivation layer 150. When the ABF, or the like, isused as the material of the passivation layer 150, a weight percent ofthe inorganic filler included in the passivation layer 150 may begreater than that of the inorganic filler included in the insulatinglayer 141 of the second connection member 140. In this condition,reliability may be improved. When the ABF, or the like, is used as thematerial of the passivation layer 150, the insulating layer 141 may be anon-photosensitive insulating layer including the inorganic filler, andmay be effective in improving reliability, but is not limited thereto.

An underbump metal layer 160 may be additionally configured to improveconnection reliability of the connection terminals 170 and to improveboard level reliability of the fan-out semiconductor package 100A. Theunderbump metal layer 160 may be connected to the redistribution layer142 of the second connection member 140 opened through the openings 151of the passivation layer 150. The underbump metal layer 160 may beformed in the openings 151 of the passivation layer 150 by the knownmetallization method using a known conductive material such as a metal,but is not limited thereto.

The connection terminals 170 may be additionally configured tophysically or electrically, externally connect the fan-cut semiconductorpackage 100A. For example, the fan-out semiconductor package 100A may bemounted on the main board of the electronic device through theconnection terminals 170. Each of the connection terminals 170 may foeformed of a conductive material, for example, a solder, or the like.However, this is only an example, and a material, of each of theconnection terminals 170 is not particularly limited thereto. Each ofthe connection terminals 170 may be a land, a ball, a pin, or the like.The connection terminals 170 may be formed as a multilayer or singlelayer structure. When the connection terminals 170 are formed as amultilayer structure, the connection terminals 170 may include a copper(Cu) pillar and a solder. When the connection terminals 170 are formedas a single layer structure, the connection terminals 170 may include atin-silver solder or copper (Cu). However, these are only examples, andthe connection terminals 170 are not limited thereto.

The number, an interval, a disposition, or the like, of the connectionterminals 170 is not particularly limited, and may be sufficientlymodified by a person skilled in the art, depending on designparticulars. For example, the connection terminals 170 may be providedin an amount of several tens to several thousands according to thenumber of connection pads 122 of the semiconductor chip 120, but are notlimited thereto, and may also be provided in an amount of several tensto several thousands or more or several tens to several thousands orless. When the connection terminals 170 are solder balls, the connectionterminals 170 may cover side surfaces of the underbump metal layer 160extending onto one surface of the passivation layer 150, and connectionreliability may be excellent.

At least one of the connection terminals 170 may be disposed in afan-out region. The fan-out region is a region except for a region inwhich the semiconductor chip 120 is disposed. That is, the fan-outsemiconductor package 100A according to the exemplary embodiment may bea fan-out package. The fan-out package may have excellent reliability,as compared to a fan-in package, may implement a plurality ofinput/output (I/O) terminals, and may facilitate a 3D interconnection.In addition, as compared to a ball grid array (BGA) package, a land gridarray (LGA) package, or the like, the fan-out package may be mounted onan electronic device without a separate board. Thus, the fan-out packagemay be manufactured to be thin, and may be price competitive.

The resin layer 180 may be used for separately manufacturing the heatdissipation layers 182 and introducing only a satisfactory heatdissipation layer of the separately manufactured heat dissipation layers182 into the fan-out semiconductor package 100A. The heat dissipationlayer 182 may be formed by a separate process through the resin layer180, and the heat dissipation layer 182 may be introduced in a manner ofselectively adopting only satisfactory heat dissipation layers, exceptfor defective heat dissipation layers, among the manufactured heatdissipation layers 182, and embedding the adopted good heat dissipationlayers in the encapsulant 130 encapsulating the semiconductor chip 120,such that a decrease in a yield of the semiconductor chip 120 may besignificantly suppressed. Therefore, a cost required for manufacturingthe fan-out semiconductor package 100A may be significantly reduced, anda time required for manufacturing the fan-out semiconductor package 100Amay also be significantly reduced.

A material of the resin layer 180 may be the known insulating materialsuch as ABF, including an inorganic filler and an insulating resin,prepreg including a glass fiber (or a glass cloth or a glass fabric), orthe like. A weight percent of the inorganic filler included in the resinlayer 180 may be greater than that of the inorganic filler included inthe encapsulant 130. In this condition, generation of warpage of thefan-out semiconductor package 100A, due to a difference in a coefficientof thermal expansion (CTE) between the resin layer 180 and theencapsulant 130, may be significantly reduced without causing a defectsuch as delamination of the encapsulant 130. Meanwhile, when the resinlayer 180 includes a material that is the same as or similar to that ofthe passivation layer 150, for example, when both the resin layer 180and the passivation layer 150 include the ABF including the inorganicfiller and the insulating resin, warpage dispersion may be controlled tomore effectively control warpage of the fan-out semiconductor package100A.

The first openings 181 a may penetrate through the resin layer 180 andthe encapsulant 130. The first openings 131 a may open at least portionsof a surface of the second redistribution layer 112 b of the firstconnection member 110. Second openings 181 b may penetrate through theresin layer 180. The second openings 181 b may open at least portions ofa surface of the heat dissipation layer 182. The opened surfaces of thesecond redistribution layer 112 b of the first connection member 110 bythe first openings 181 a may be used as markings, pads for solder balls,surface mounted components, or the like, or as pads for apackage-on-package structure, or the like.

The heat dissipation layer 182 may serve to dissipate the heat generatedfrom the semiconductor chip 120, or the like, outwardly of the fan-outsemiconductor package. In addition, the heat dissipation layer 182 mayhave an electromagnetic wave blocking function. The heat dissipationlayer 182 may be embedded in the encapsulant 130, such that a distancebetween the inactive surface of the semiconductor chip 120 and the heatdissipation layer 182 is short, resulting in a sufficient heatdissipation effect. The heat dissipation layer 182 may include a metalhaving excellent heat dissipation ability, such as copper (Cu). In thiscase, the heat dissipation layer 182 may have a thickness greater thanthose of circuits of the redistribution layers 112 a, 112 d, and 142, orthe like, to have an excellent heat dissipation effect. The heatdissipation layer 182 does not have a wiring form as in a circuit, butmay have a post form. For example, the heat dissipation layer 182 mayhave large and small plane shapes, but is not limited thereto. When theheat dissipation layer 192 has the plane shapes, the heat dissipationlayer 182 may have a plurality of plane shapes, as illustrated in thedrawing, or may have one large plane shape. Meanwhile, such a heatdissipation layer 182 may also be effective in controlling warpage, tothus improve structural stability of the fan-out semiconductor package.

The heat dissipation layer 182 may include a seed layer 182 a formed onthe resin layer 180 and a conductor layer 182 b formed on the seed layer182 a, as described below. Each of the seed layer 182 a and theconductor layer 182 b may include a known conductive material such ascopper (Cu). The seed layer 182 a may contact the resin layer 180. Theconductor layer 182 b may contact the encapsulant 130, and may be spacedapart from the resin layer 180. The seed layer 182 a may serve as aseed, and a thickness of the seed layer 182 a may thus be thinner thanthat of the conductor layer 182 b. In some cases, at least one of thechemical reaction groups included in the insulating resin constitutingthe resin layer 180 may be self-assembled with a metal of the seed layer182 a formed on a surface of the resin layer 180. In this case, the seedlayer 182 a and the resin layer 180 may have excellent close adhesiontherebetween.

FIGS. 11A through 11C are schematic views illustrating an example ofprocesses of manufacturing the fan-out semiconductor package of FIG. 9.

Referring to FIG. 11A, the resin layer 180 and the heat dissipationlayer 182 may be formed on a detachable film 210 by separate processes.For example, the resin layer 180 may be laminated on the knowndetachable film 210, the seed layer 182 a may be formed on the resinlayer 180 by the known plating method, the patterned conductor layer 182b may be formed on the seed layer 182 a, and portions of the seed layer182 a, except for patterned portions, may be removed by etching, or thelike. The plating may be performed using the known method such aselectroplating, electroless plating, chemical vapor deposition (CVD),physical vapor deposition (PVD), sputtering, a subtractive process, anadditive process, a semi-additive process (SAP), a modifiedsemi-additive process (MSAP), or the like. Only good heat dissipationlayers 182 of manufactured heat dissipation layers may be selectivelyadopted.

Referring to FIG. 11B, the semiconductor chip 120 may be disposed in thethrough-hole 110H of the first connection member 110 using a temporaryfilm 220 such as an adhesive film, or the like, by a separate process.For example, the first connection member 110 may be formed, the firstconnection member 110 may be attached to the temporary film 220, and thesemiconductor chip 120 may be attached to and disposed on the temporaryfilm 220 exposed through the through-hole 110H in a face-down form. Onlya good first connection member 110 may be selectively adopted before thesemiconductor chip 120 is disposed, and a yield of the semiconductorchip 120 may thus be further improved in this process. Meanwhile, thefirst connection member 110 may be formed by forming the firstredistribution layer 112 a on a carrier film, forming the insulatinglayer 111 embedding the first redistribution layer 112 a therein,forming the vias 113 penetrating through the insulating layer 111,forming the second redistribution layer 112 b on the insulating layer111, and separating them from the carrier film. Then, the semiconductorchip 120 may be encapsulated using the encapsulant 130. The encapsulant130 may encapsulate at least the first connection member 110 and theinactive surface of the semiconductor chip 120, and may fall a spacewithin the through-hole 110H. The encapsulant 130 may be formed by aknown method. For example, the encapsulant 130 may be formed by a methodof laminating a precursor of the encapsulant 130 and then hardening theprecursor. Alternatively, the encapsulant 130 may be formed by a methodof applying a pre-encapsulant to the temporary film 220 to encapsulatethe semiconductor chip 120 and then hardening the pre-encapsulant. Asthe method of laminating the precursor, for example, a method ofperforming a hot press process of pressing the precursor for apredetermined time at a high temperature, decompressing the precursor,and then cooling the precursor to room temperature, cooling theprecursor in a cold press process, and then separating a work tool, orthe like, may be used. As the method of applying the pre-encapsulant,for example, a screen printing method of applying ink with a squeegee, aspray printing method of applying ink in a mist form, or the like, maybe used. The semiconductor chip 120 may be fixed by the hardening. Then,the detachable film 210 on which the separately manufactured heatdissipation layer 182 and the resin layer 180 are formed may belaminated on the encapsulant 130 so that the heat dissipation layer 182is embedded in the encapsulant 130.

Referring to FIG. 11C, the detachable film 210 may be stripped. Inaddition, the temporary film 220 may be removed. The second connectionmember 140 may be formed in a region in which the temporary film 220 isstripped, using a fine semiconductor process, or the like. The secondconnection member 140 may be formed by forming the insulating layers 141and then forming the redistribution layers 142 and the vias 143 incorresponding layers. The passivation layer 150 may be formed on thesecond connection member 140 using a lamination method, or the like, ifnecessary. Then, the first openings 181 a and the second openings 181 bmay be formed. The first openings 181 a and the second openings 181 bmay be formed using a mechanical drill, a laser drill, or the like. Thefirst openings 181 a and the second openings 181 b may also be formed bya photolithography method, depending on insulating materials of theresin layer 180 and the encapsulant 130. In addition, the openings 151may be formed by a similar method, and the underbump metal layer 160,the connection terminals 170, and the like, may be formed by a knownmethod.

FIG. 12 is a schematic cross-sectional view illustrating another exampleof a fan-out semiconductor package.

Referring to the drawing, a fan-out semiconductor package 100 aaccording to another exemplary embodiment in the present disclosure mayfurther include a metal layer 115 disposed on a wall of a through-hole110H. The metal layer 115 may include a metal having excellent heatdissipation characteristics, such as copper (Cu), or the like. Heatgenerated from a semiconductor chip 120 may be dissipated laterallythrough the metal layer 115. Therefore, a heat dissipation effect may beexcellent. In addition, an electromagnetic wave blocking effect may alsobe improved.

A description of other configurations and a manufacturing methodoverlapping those described above will be omitted.

FIG. 13 is a schematic cross-sectional view illustrating another exampleof a fan-out semiconductor package.

Referring to the drawing, in a fan-out semiconductor package 100Caccording to another exemplary embodiment in the present disclosure, afirst connection member 110 may include a first insulating layer 111 ain contact with a second connection member 140, a first redistributionlayer 112 a in contact with the second connection member 140 andembedded in the first insulating layer 111 a, a second redistributionlayer 112 b disposed on the other surface of the first insulating layer111 a, opposing one surface of the first insulating layer 111 a in whichthe first redistribution layer 112 a is embedded, a second insulatinglayer 111 b disposed on the first insulating layer 111 a and coveringthe second redistribution layer 112 b, and a third redistribution layer112 c disposed on the second insulating layer 111 b. The first to thirdredistribution layers 112 a, 112 b, and 112 c may be electricallyconnected to connection pads 122. The first and second redistributionlayers 112 a and 112 b and the second and third redistribution layers112 b and 112 c may be electrically connected to each other throughfirst and second vias 113 a and 113 b, penetrating through the first andsecond insulating layers 111 a and 111 b, respectively.

Since the first redistribution layer 112 a is buried in the firstinsulating layer 111 a, an insulating distance of an insulating layer141 of the second connection member 140 may be substantially constant,as described above. Since the first connection member 110 may include alarge number of redistribution layers 112 a, 112 b, and 112 c, thesecond connection member 140 may be further simplified. Therefore, adecrease in a yield depending on a defect occurring in a process offorming the second connection member 140 may be suppressed. The firstredistribution layer 112 a may be recessed in the first insulating layer111 a, such that a lower surface of the first insulating layer 111 a mayhave a step, with respect to a lower surface of the first redistributionlayer 112 a. As a result, when an encapsulant 130 is formed, aphenomenon in which a material of the encapsulant 130 bleeds to pollutethe first redistribution layer 112 a may be prevented.

The lower surface of the first redistribution layer 112 a of the firstconnection member 110 may be disposed on a level above a lower surfaceof the connection pad 122 of a semiconductor chip 120. In addition, adistance between the redistribution layer 142 of the second connectionmember 140 and the first redistribution layer 112 a of the firstconnection member 110 may be greater than that between theredistribution layer 142 of the second connection member 140 and theconnection pad 122 of the semiconductor chip 120. This is due to thefact that the first redistribution layer 112 a may be recessed into thefirst insulating layer 111 a. The second redistribution layer 112 b ofthe first connection member 110 may be disposed on a level between anactive surface and an inactive surface of the semiconductor chip 120.The first connection member 110 may be formed at a thicknesscorresponding to that of the semiconductor chip 12C. Therefore, thesecond redistribution layer 112 b formed in the first connection member110 may be disposed on a level between the active surface and theinactive surface of the semiconductor chip 120.

Thicknesses of the redistribution layers 112 a, 112 b, and 112 c of thefirst connection member 110 may be greater than that of theredistribution layer 142 of the second connection member 14C. Since thefirst connection member 110 may have a thickness greater than or equalto that of the semiconductor chip 120, the redistribution layers 112 a,112 b, and 112 c may be formed in large sizes, depending on a scale ofthe first connection member 110. On the other hand, the redistributionlayer 142 of the second connection member 140 may be formed in arelatively small size, for thinness.

A description of other configurations and a manufacturing methodoverlapping those described above will be omitted. Meanwhile, thedescription of the fan-cut semiconductor package 100B described abovemay also be applied to the fan-out semiconductor package 100C.

FIG. 14 is a schematic cross-sectional view illustrating another exampleof a fan-cut semiconductor package.

Referring to the drawing, in a fan-out semiconductor package 100Daccording to another exemplary embodiment in the present disclosure, afirst connection member 110 may include a first insulating layer 111 a,a first redistribution layer 112 a and a second redistribution layer 112b disposed on opposite surfaces of the first insulating layer 111 a,respectively, a second insulating layer 111 b disposed on the firstinsulating layer 111 a and covering the first redistribution layer 112a, a third redistribution layer 112 c disposed on the second insulatinglayer 111 b, a third insulating layer 111 c disposed on the firstinsulating layer 111 a and covering the second redistribution layer 312b, and a fourth redistribution layer 112 d disposed on the thirdinsulating layer 111 c. The first to fourth redistribution layers 112 a,112 b, 112 c, and 112 d may be electrically connected to connection pads122. Since the first connection member 110 may include a larger numberof redistribution layers 112 a, 112 b, 112 c, and 112 d, a secondconnection member 140 may be further simplified. Therefore, a decreasein yield, depending on a defect occurring in a process of forming thesecond connection member 140, may be suppressed. The first to fourthredistribution layers 112 a, 112 b, 112 c, and 112 d may be electricallyconnected to each other through first to third vias 113 a, 113 b, and113 c, penetrating through the first to third insulating layers 111 a,111 b, and 111 c, respectively.

The first insulating layer 111 a may have a thickness greater than thoseof the second insulating layer 111 b and the third insulating layer 111c. The first insulating layer 111 a may be relatively thick in order tomaintain rigidity, and the second insulating layer 111 b and the thirdinsulating layer 111 c may be introduced in order to form a largernumber of redistribution layers 112 c and 112 d. The first insulatinglayer 111 a may include an insulating material different from those ofthe second insulating layer 111 b and the third insulating layer 111 c.For example, the first insulating layer 111 a may be, for example,prepreg including a core material, an inorganic filler, and aninsulating resin, and the second insulating layer 111 b and the thirdinsulating layer 111 c may be an ABF or a photosensitive insulating filmincluding an inorganic filler and an insulating resin. However, thematerials of the first insulating layer 111 a and the second and thirdinsulating layers 111 b and 111 c are not limited thereto. Similarly,the first, via 113 a may have a diameter greater than those of thesecond via 113 b and the third via 113 c.

A lower surface of the third redistribution layer 112 c of the firstconnection member 110 may be disposed on a level below a lower surfaceof the connection pad 122 of a semiconductor chip 120. In addition, adistance between a redistribution layer 142 of the second connectionmember 140 and the third redistribution layer 112 c of the firstconnection member 110 may be less than that between the redistributionlayer 142 of the second connection member 140 and the connection pad 122of the semiconductor chip 120. This is due to the fact that the thirdredistribution layer 112 c may be disposed in a protruding form on thesecond insulating layer 111 b, resulting in contact with the secondconnection member 140. The first redistribution layer 112 a and thesecond redistribution layer 112 b of the first, connection member 110may be disposed on a level between an active surface and an inactivesurface of the semiconductor chip 120. The first connection member 110may be formed at a thickness corresponding to that of the semiconductorchip 120. Therefore, the first redistribution layer 112 a and the secondredistribution layer 112 b formed in the first connection member 110 maybe disposed on a level between the active surface and the inactivesurface of the semiconductor chip 120.

Thicknesses of the redistribution layers 112 a, 112 b, 112 c, and 112 dof the first connection member 110 may be greater than that of theredistribution layer 142 of the second connection member 140. Since thefirst connection member 110 may have a thickness equal to or greaterthan that of the semiconductor chip 120, the redistribution layers 112a, 112 b, 112 c, and 112 d may also be formed to have large sizes. Onthe other hand, the redistribution layer 142 of the second connectionmember 140 may be formed in a relatively small size, for thinness.

A description of other configurations and a manufacturing methodoverlapping those described above will be omitted. Meanwhile, thedescription of the fan-out semiconductor package 100B described abovemay also be applied to the fan-out semiconductor package 100D.

FIG. 15 is a schematic view illustrating a heat dissipation effectdepending on thermal conductivity of an encapsulant.

It may be appreciated from the drawing that when the heat dissipationlayer 182 including copper (Cu) and having a thickness of 30 μm or moreis introduced, and a material having thermal conductivity of 30 W/m·K ormore is used as the material of the encapsulant 130, a heat radiationeffect is excellent. Meanwhile, a reference of an amount of generatedheat is 2 W.

As set forth above, according to the exemplary embodiments in thepresent disclosure, a tan-out semiconductor package in which heatdissipation characteristics are excellent and a decrease in a yield of asemiconductor chip is suppressed may be provided.

While exemplary embodiments have been shown and described above, it willbe apparent to those skilled in the art that modifications andvariations could be made without departing from the scope of the presentinvention, as defined by the appended claims.

What is claims is:
 1. A semiconductor package comprising: asemiconductor chip having an active surface having connection padsdisposed thereon and an inactive surface opposing the active surface; anencapsulant covering at least a portion of the inactive surface of thesemiconductor chip; a connection member disposed on the active surfaceof the semiconductor chip and including a redistribution layerelectrically connected to the connection pads of the semiconductor chip;a conductive structure disposed above the connection member, anddisposed adjacent to the semiconductor chip; a conductive layer embeddedin the encapsulant such that at least a portion of one surface of theconductive layer faces the inactive surface of the semiconductor chip,wherein the conductive layer has a thickness greater than that of theredistribution layer of the connection member, and wherein anothersurface of the conductive layer, opposing the one surface of theconductive layer, is exposed from the encapsulant; a resin layerdisposed on the encapsulant and covering at least first portions of theanother surface of the conductive layer; a first opening penetrating theresin layer and the encapsulant and exposing a portion of the conductivestructure; and a second opening penetrating the resin layer and exposinga portion of the conductive layer.
 2. The semiconductor package of claim1, wherein the conductive layer includes at least one plane shapepattern.
 3. The semiconductor package of claim 1, wherein at least aportion of the conductive structure is covered by an insulatingmaterial.
 4. The semiconductor package of claim 1, wherein the resinlayer has openings exposing at least second portions of the anothersurface of the conductive layer.
 5. The semiconductor package of claim1, wherein an upper surface of the conductive structure and the anothersurface of the conductive layer are disposed on different levels.
 6. Thesemiconductor package of claim 1, wherein the encapsulant has thermalconductivity greater than that of an insulating layer of the connectionmember.
 7. The semiconductor package of claim 6, wherein the encapsulantand the insulating layer of the connection member include insulatingresins and inorganic fillers, respectively, and a weight percentage ofthe inorganic fillers included in the encapsulant is less than that ofthe inorganic fillers included in the insulating layer of the connectionmember.
 8. The semiconductor package of claim 1, wherein the conductivelayer is formed of a metal and is electrically isolated from theconductive structure.
 9. A semiconductor package comprising: aconnection member including a redistribution layer; a semiconductor chipdisposed above the connection member and having an active surface havingconnection pads disposed thereon and an inactive surface opposing theactive surface, the active surface facing the connection member; aninterconnection member disposed above the connection member, disposedadjacent to the semiconductor chip and including a conductive portion;an encapsulant disposed above the connection member and encapsulating atleast portions of the inactive surface of the semiconductor chip and theinterconnection member; a conductive layer embedded in the encapsulantsuch that one surface of the conductive layer is exposed; and a resinlayer disposed on the encapsulant and covering at least portions of theone surface of the conductive layer, wherein a first opening penetratingthe resin layer and the encapsulant exposes a portion of the conductiveportion of the interconnection member, and a second opening penetratingthe resin layer exposes a portion of the conductive layer.
 10. Thesemiconductor package of claim 9, wherein an upper surface of theconductive portion of the interconnection member and the one surface ofthe conductive layer are disposed on different levels.
 11. Thesemiconductor package of claim 9, wherein the conductive layer includesa first metal layer disposed on the resin layer and a second metal layerdisposed on the first metal layer, and the second metal layer is thickerthan the first metal layer.